| 摘要 |
PURPOSE:To eliminate the effect of the atmospheric pressure and thrust pressure at a time of shifting a sample on a sample holding part and thereby make the thickness of the holding part thin and improve resolving power by arranging a floating body between a driving bar and a spherical step part formed between the base part of the sample holder and the sample holding part. CONSTITUTION:On driving a set screw 18, a driving bar 17 moves and this movement is transmitted to the step part 12c of a sample holder 12 and thereby a sample 13 moves in the direction of X-axis. At this time, though the atmospheric pressure has effect on a holder 12, this force is received on a floating body 20 through the step part 12c. Next, on driving a set screw 14, the holder 12 moves with rotation having a ball bearing 10 as a center. At this time, the holder 12 is pushed against the taper 23 of the floating body 20a by the atmospheric pressure and besides the floating body 20 is held rotatably in three dimension against a bar 17, therefore the holder 12 moving with rotation in a holding cylinder 11, the step part 12c moving with rotation on the taper 23, besides the locus drawn by the step part 12c becoming a circular arc made a junction point between the bar 17 and the floating body 20 as its center, thus the sample 13 can shift in the direction of Y-axis or X-axis.
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