FULL SURFACE BLOW OFF CEILING FACILITIES IN VERTICAL LAMINAR FLOW TYPE CLEAN ROOM

摘要

PURPOSE:To increase the filter area ratio and effectively discharge minute powdery dusts within a room by aligning a large number of filter units in a longitudinal direction and a horizontal direction and coupling these units, and providing vent holes at positions which are lower than the filter units. CONSTITUTION:Air blown into a slab 4 and each filter unit 1 is cleaned while passing through each filter unit 1. Clean air which has passed through each filter unit 1 passes through vent holes 25 and louvers 26 in each ventilation ceiling panel 31 and each cylinder 2, and is blown off into the room in a laminar flow state from the substantially full surface of the ceiling. Purified air which has been blown off in the laminar flow state into the room passes through the floor grating of the clean room by accompanying minute dust within the room and again is blown off into spaces between the slab 4 and the filter units 1.