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发明名称
METHOD AND APPARATUS FOR CLEANING ION IMPLANTATION CHAMBER
摘要
申请公布号
JPS62139239(A)
申请公布日期
1987.06.22
申请号
JP19860283047
申请日期
1986.11.27
申请人
EATON CORP
发明人
MAIKERU GAARA
分类号
H01L21/265;H01J37/18;H01J37/30;H01J37/317
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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