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发明名称
MANUFACTURE OF SULFIDE CERAMIC TARGET
摘要
申请公布号
JPS62138355(A)
申请公布日期
1987.06.22
申请号
JP19850279635
申请日期
1985.12.11
申请人
MURATA MFG CO LTD
发明人
TANAKA KATSUHIKO;SETO HIROYUKI
分类号
C04B35/547;C04B35/00;C04B35/64
主分类号
C04B35/547
代理机构
代理人
主权项
地址
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