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发明名称
摘要
申请公布号
JPS6228538(B2)
申请公布日期
1987.06.20
申请号
JP19780047780
申请日期
1978.04.24
申请人
HITACHI LTD
发明人
TANAKA SHINJI;TAKAHASHI SOJI;AKEYAMA MASAMOTO
分类号
H01J9/14;H01J9/00;H01J9/22;H01J29/07;H01J31/20
主分类号
H01J9/14
代理机构
代理人
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