| 摘要 |
PURPOSE:To permit working with substantially no deformation and distortion in later stages for deposition of soft magnetic alloy films, etc., by preliminarily manufacturing a substrate for deposition of the soft magnetic alloy films as a sure composite substrate by laminating nonmagnetic materials and ferrite and subjecting the laminate to a heat treatment, etc., under pressurization. CONSTITUTION:The photosensitive crystallized glass substrates 1 in the uncrystallized state irradiated with UV rays at the exposure adjusted to have the coefft. of thermal expansion coinciding with the coefft. of thermal expansion of the polycrystalline Mn-Zn ferrite substrate and the polycrystalline Mn-Zn ferrite substrates 2 are alternately laminated and are subjected to the heat treatment while these substrates are held under the pressure. The laminated block is parted at the same pitch perpendicularly to the joint surfaces shown by a broken line to form the composite substrate composed of the ferrite 2 and the photosensitive crystallized glass 1. Both faces of the resultant composite substrate are polished and the soft magnetic Fe-Si-Al alloy films 3 are formed thereon. The substrates formed with the soft magnetic alloy films and the substrates in the as-polished state without being formed with the films are alternately laminated and are adhered to form the block.
|
