PRODUCTION OF OPTICAL INFORMATION RECORDING AND REPRODUCING DISK

摘要

PURPOSE:To form an optical disk film which is free from abnormal electric discharge and has decreased defects by using a sputtering target of a high m.p. contg. Te and applying a reactive sputtering method in a gaseous oxygen atmosphere. CONSTITUTION:The vapor deposition method to form the thin film essentially consisting of TeOx(0<x<2.0) is executed by a sputtering method and an alloy of the Te and Pd and the mixture composed thereof are used for the sputtering target. Reactive sputtering is executed in a gaseous O2 atmosphere. The melting of the target and the generation of the abnormal discharge are thereby suppressed and the disk which is free from the generation of defects as a result of bumping, etc., is thus obtd.