| 摘要 |
PURPOSE:To shorten the starting time by evacuating the inside of a vacuum vessel up to a predetermined pressure, heating the outer surface of the vacuum vessel by a fluid at a high temperature and driving a revolving electric machine installed into the vacuum, vessel. CONSTITUTION:A rotary vacuum pump 7 is operated. A valve 12 is opened at the time T1 when a pressure-fluctuation gradient is made easy, and fluid at a high temperature is made to flow into a fluid path 10. The inner surface of a vacuum vessel 1 and an interior part such as a motor are degassed and treated by the heating. The valve 12 is controlled to be closed at the time T2 after a fixed time passes. The valve 12 is controlled to be opened again at the time T3 when pressure is made lower than that at the time T1. The inside of the vacuum vessel 1 is evacuated up to predetermined pressure or less, repeating the opening and closing of the valve 12. The motor 4 is driven at the time reaching target pressure. The valve 14 is controlled to be opened at the time when operation transfers to stationary operation, and a fluid at a low temperature is made to flow through the fluid path 10.
|
