| 摘要 |
PURPOSE:To provide superior resistance to corrosion by halogen vapor to an apparatus for producing crystal bar zirconium by the decomposition of halide by coating the inside of the apparatus with a material having corrosion resistance in halogen vapor. CONSTITUTION:A U-shaped filament 2 is suspended in a vapor deposition vessel 1 for producing crystal bar zirconium and both ends of the filament 2 are fitted to power supplying jigs 3a, 3b connected to a power source 5 through lead wires 4a, 4b. Sponge zirconium 6 and iodine 7 are put on the bottom of the vessel 1 and the vessel 1 is heated from the outside. A coating layer 9 of molybdenum, tungsten, platinum or an alloy thereof having corrosion resistance halogen vapor has been formed on the inside of the vessel 1.
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