| 摘要 |
PURPOSE:To improve rigidity by forming the film of metal with high hardness and high elastic modulus, or the compound of the metal on a plastic film substrate controlling a substrate temperature in a film forming process so as to form a random net shaped projection on the surface of the film. CONSTITUTION:The film 2' of a metallic compound with high hardness and high elastic modulus is formed on the substrate 1 of plastic film by a high frequency reacting ion plating. At such a time, a temperature in the substrate 1 due to a radiant heat from an evaporation source rises with the time elapse of the ion plating, and since the coefficient of contraction of the film substrate 1 having a larger coefficient of heat expansion compared with the metallic compound is larger than that of a formed metallic compound film 2', the film 2' swells forming the projection 3 partially. Next, the metallic compound film 2' is formed by cooling it on the substrate 1. In this way, the surface of the film 2'' is formed in a shape having the random net shaped projection 3, and performs a function as the skeleton of a diaphragm, and the rigidity as the diaphragm can be improved. |
