| 摘要 |
PURPOSE:To improve the activation efficiency of the reactive gas in a reaction chamber by selecting only the gas which forms a long-life metastable excitation species and passing the gas through the 1st plasma generating means. CONSTITUTION:This plasma treatment device is formed of the reaction chamber 1, the 1st plasma generating means 5, 6, a means for conducting the metastable excitation species generated therefrom to the reaction chamber 1, a means for introducing the reactive gas into the reaction chamber 1 and the 2nd plasma generating means 11, 12 for activating said gas. The 1st plasma generating means 5, 6 generate the metastable excitation species of >=10ms life. >=1 kinds of rare gas, nitrogen and oxygen are used as the gas for generating the metastable excitation species.
|
