发明名称 RECTANGULAR MASK SUBSTRATE TRANSFER DEVICE
摘要 PURPOSE:To make the apparatus applicable to various sizes of works with no contact with the surfaces of the works by supporting a work at the edges thereof on a work table of a V-shaped configuration in section, lowering the table to transfer the work onto two sets of tapered rollers, and then pushing out the work by a push-out mechanism. CONSTITUTION:When a work 1 is put on a table 2 by carrying chucks 5, a motor 9 is rotated under the control, such as, of a sequencer to lower the table 2, and the work 1 is transferred onto rollers 3. Then, a motor 12 is rotated to push out the work 1 by a push-out device 4, the work 1 being transferred to a storage cassette 15. In this way, as the process achieves transfer of a work by contacting only the edges thereof, keeping the front and rear surfaces from being contacted, there is no fear of deterioration of the quality of the work, and, as both of the work table and the tapered rollers can meet various sizes of works, there is no necessity of changing the setup.
申请公布号 JPS62136428(A) 申请公布日期 1987.06.19
申请号 JP19850274322 申请日期 1985.12.07
申请人 HITACHI ELECTRONICS ENG CO LTD 发明人 IIZUKA NOBUYUKI;FUKUSHIMA TSUNEMI
分类号 B65G47/82;B65G13/00;B65G47/52;H01L21/67;H01L21/677;H01L21/68 主分类号 B65G47/82
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