| 摘要 |
PURPOSE:To generate high torque with high reliability by mounting electrostrictive element plates to both side surfaces of a diaphragm and applying driving voltage, relative phase thereof is controlled, to each electrostrictive element plate. CONSTITUTION:Electrostrictive element plates 12, 13 are fitted to both sides surfaces of a diaphragm 11, and a rail 15 is pressure-welded to one end surface 14 of the diaphragm 11. Driving voltage, relative phase thereof is controlled, is applied to respective electrostrictive element plate 12, 13 so that an end surface 14 in the diaphragm 11 conducts rectilinear vibrations in the axial direction or deflection direction of the end surface 14 and circular or elliptical vibrations having axes in the axial direction and deflection direction. The diaphragm 11 can be moved on the rail 15, freely changing the direction and speed thereof. |
