| 摘要 |
PURPOSE:To obtain the titled thin film containing a pigment dispersed therein in a high concentration, by integrating a thin film of a poly-p-xylylene and a pigment into a composite while keeping the pigment in a state dispersed on the thin film. CONSTITUTION:A raw material 4 for a poly-p-xylylene, held in a sublimation part or a vaporization part 4, is sublimed or vaporized by heating to 100-200 deg.C in an electric furnace 3, fed to a decomposition part 5, decomposed by heating to 600-800 deg.C in an electric furnace 3 and fed to a polymerization part 6 communicating with a vacuum system 8. At the same time, a pigment contained in a high-thermal conductivity, high-heat resistance tube 9 with one end thereof being stopped is sublimed or vaporized by heating with a heater 12 and fed to the polymerization part 6 to allow the surface of a deposition plate 7 to adsorb a 0.1-10mum-thick poly-p-xylylene film which, together with the pigment, forms a composite in which the pigment is dispersed in a concentration of 10<-1>mol/l or below. |
