| 摘要 |
PURPOSE:To make it possible not only to simplify an inspection process but also to prevent the damage of a measuring member, by synchronously operating a turntable and an arm member and simultaneously measuring the thickness and flatness degree of a member to be measured on the basis of each gap detected with respect to a plurality of places of the member to be measured. CONSTITUTION:The positioning hole edge of a magnetic disk 1 is positioned and supported at the corresponding stepped part 22a of a movable table 22 and an arm member 3 is moved to vertical and horizontal directions and a pair of sensors 60 is fixedly arranged at an initial measuring circle position P1 in the vicinity of the peripheral edge of said disk 1. When a measuring point is set to N and, for example, eight points are set in the circumferential direction and three points are set in the radius direction, a control part 70 allows sensors 50 to operate at a plurality of points in the circumferential direction at the initial measuring circle position P1. Then, sensors 60 are successively moved to the next measuring circle positions P2, P3 in the radius direction. In a measurement finish stage, the control part 70 calculates the gaps (a), (b) between the sensors 60 and the surface of the magnetic disk 1 as measured values and the thickness (t) and flatness degree (f) at each measuring point (i) are successively calculated and the resulting data is stored in RAM 72 in a readable manner.
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