| 摘要 |
PURPOSE:To make it possible to automatically identify a specimen on the basis of a photoelectric spectrum, by a method wherein the specimen is irradiated with exciting rays different in energy to obtain two kinds of spectrum signals and the peak matching of these signals is performed to compare a signal from which an Auger electron spectrum peak was removed with the spectrum peak data of a known substance. CONSTITUTION:X-rays R from a twin-anode X-ray generation source 1 are allowed to irradiate a specimen 2 to generate a photoelectron (p) and an Auger electron (a) which are, in turn, incident to a cylindrical mirror type energy analyser 3 to be separated corresponding to the kinetic energies thereof and the output signal of a detector 5 is stored in a memory apparatus 8 through an amplifier 6 and an AD converter 7. CPU 9 sends the sweep control signal of the analyser to a sweep power source 4 and further sends a control signal for selecting the kind of X-rays, that is, the characteristic X-rays of magnesium or that of aluminum to the X-ray generation source 1 to further display the analytical result on CRT 11. |
