| 摘要 |
PURPOSE:To make it possible to obtain a measured value of thermal diffusivity without irregularity even with respect to a specimen having large thermal diffusivity even if a thickness and a shape change, by irradiating the specimen which is held so as to cross the irradiation axis of a high energy ray irradiation apparatus at a right angle, with laser beam through an aperture and measuring the temp. of the specimen at the predetermined position of the back surface thereof by a non-contact thermal sensor. CONSTITUTION:The titled apparatus is constituted of a laser irradiation apparatus 11, an aperture 12 arranged in the laser irradiation direction of said apparatus 11 in order, a specimen holding apparatus 14 holding a flat plate shaped specimen so as to cross the irradiation axis of said apparatus 11 at a right angle and a non-contact thermal sensor 15 movable to the direction crossing the irradiation axis at a right angle. When the thermal diffusivity of the flat plate shaped specimen is measured using this thermal diffusivity measuring apparatus, the laser beam irradiating position on the specimen 13 is separated by a predetermined distance from the measuring position of the non-contact thermal sensor 15 and laser beam is allowed to instantaneously irradiate the specimen 13 from the laser irradiation apparatus 11. The heat history curve of the back surface temp. of the specimen is measured by the non-contact thermal sensor 15 to calculate thermal diffusivity according to a predetermined formula.
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