| 摘要 |
PURPOSE:To enhance the characteristics of an oxygen concn. detection element and to simplify a manufacturing process, by using a method for forming a membrane by depositing a stabilized zirconia molecule on a substrate and setting growth temp. stabilizer adding concn. to specific values to form a membrane with a thickness of 0.5-10mum. CONSTITUTION:A stabilized zirconia membrane 2 is formed on a substrate 1 comprising semiconductive material and, for example, an electrode 3 comprising platinum Pt is formed to the surface of the stabilized zirconia membrane 2. Next, SiO2 is formed to the side opposite to the stabilized zirconia membrane 2 of the substrate 1 as a mask 4 and anisotropic etching is performed to form a through-hole 5 reaching the surface of the side opposite to the electrode 3 of the stabilized zirconia membrane 2. For example, an electrode 6 comprising platinum is formed so as to cover the through-hole 5 by the same sputtering method as the electrode 3. By this method, an oxygen concn. detection element 7 is formed.
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