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发明名称
TOTAL ENCAPSULATED LOW PRESSURE DOOR CLOSURE APPARATUS FOR A SILICON CHIP PROCESS TUBE
摘要
申请公布号
GB2184175(A)
申请公布日期
1987.06.17
申请号
GB19860021158
申请日期
1986.09.02
申请人
CLEON R * YATES
发明人
CLEON R * YATES
分类号
H01L21/00;H01L21/677;(IPC1-7):B65G47/00;F16J15/02
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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