| 摘要 |
PURPOSE:The titled filter, obtained by mixing and pulverizing specific silica glass with synthetic quartz glass, capable of giving high reliability, e.g. alpha-ray dose, high volume resistance, corrosion resistance, etc., and applicable to dynam ic elements having >=1 megabits, etc. CONSTITUTION:A filter obtained by mixing and pulverizing (A) silica glass prepared by fusing natural quartzite with (B) 20-80pts. synthetic quartz glass produced from silicon tetrachloride as a starting material.
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