发明名称 CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE AND LIKE FILMS
摘要 A novel process for placing a thin film of a metal nitride, e.g. titanium nitride, on a glass substrate by mixing a metal halide with a reducing gas like ammonia, preferably within a range of from about 250.degree.C to 320.degree.C, and then reacting the gases at the surface of a glass substrate heated to, e.g., about 400.degree.C to about 700.degree.C to form the film on the glass.
申请公布号 CA1222912(A) 申请公布日期 1987.06.16
申请号 CA19830440868 申请日期 1983.11.09
申请人 GORDON, ROY G. 发明人 GORDON, ROY G.
分类号 C03C17/22;C23C16/34;G02B1/10 主分类号 C03C17/22
代理机构 代理人
主权项
地址