ELLIPSOMETRIC METHOD AND ARRANGEMENT FOR MONITORING THE PHYSICAL PROPERTIES OF SAMPLES OR SUPERFICIAL LAYERS OF SAMPLES,申请号EP19850105624-传众专利搜索

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发明名称	ELLIPSOMETRIC METHOD AND ARRANGEMENT FOR MONITORING THE PHYSICAL PROPERTIES OF SAMPLES OR SUPERFICIAL LAYERS OF SAMPLES
摘要
申请公布号	EP0163176(A3)	申请公布日期	1987.06.16
申请号	EP19850105624	申请日期	1985.05.08
申请人	SAGAX INSTRUMENT AB	发明人	BJORK, NILS ARVID NORMAN;SANDSTROM, ERLAND TORBJORN;STENBERG, JOHAN EMANUEL;STIBLERT, LARS BERTIL
分类号	G01B11/06;G01N21/21;G01N21/41;G02B27/28;(IPC1-7):G01N21/21	主分类号	G01B11/06
代理机构		代理人
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