| 摘要 |
PURPOSE:To improve the operability of the titled device by automatically transferring a scale corresponding to magnification. CONSTITUTION:At the input of an identification signal, a computer 4 reads out reference length corresponding to the input signal on a sample surface from a storage circuit 6 and outputs the read length to a driving circuit 7 for a light emitting device. The driving circuit 7 provides a numeral to a light emitting diode 8 consisting of seven segments to drive a light emitting diode 9 for irradiating a mask of a reference unit code. The numeral and the reference unit code of the diode 8 are transferred to the conjugate positions of the back of a film 1 arranged on the back of a light shielding mask 11 through a projection lens 10. For instance, the scale is transferred to the film 1 and the interval between black projection chips 12a, 12b on a sample is indicated as 1.5mum.
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