发明名称 |
Controlled vacuum arc material deposition, method and apparatus |
摘要 |
A method and apparatus for vacuum arc deposition of material on a surface of an object uses a vacuum chamber accommodating the active surface of the cathode and an anode. A power supply connected to the anode and cathode establishes an electric arc. The track of the arc is controlled with a magnetic field established with a permanent magnet that is moved in a closed path relative to the cathode. A solenoid modifies the main magnetic field produced on the active surface of the cathode.
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申请公布号 |
US4673477(A) |
申请公布日期 |
1987.06.16 |
申请号 |
US19860825958 |
申请日期 |
1986.02.04 |
申请人 |
REGENTS OF THE UNIVERSITY OF MINNESOTA |
发明人 |
RAMALINGAM, SUBBIAH;QI, CAI B.;KIM, KYUNGHOON |
分类号 |
C23C14/32;H01J37/32;(IPC1-7):C23C14/22 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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