发明名称 Controlled vacuum arc material deposition, method and apparatus
摘要 A method and apparatus for vacuum arc deposition of material on a surface of an object uses a vacuum chamber accommodating the active surface of the cathode and an anode. A power supply connected to the anode and cathode establishes an electric arc. The track of the arc is controlled with a magnetic field established with a permanent magnet that is moved in a closed path relative to the cathode. A solenoid modifies the main magnetic field produced on the active surface of the cathode.
申请公布号 US4673477(A) 申请公布日期 1987.06.16
申请号 US19860825958 申请日期 1986.02.04
申请人 REGENTS OF THE UNIVERSITY OF MINNESOTA 发明人 RAMALINGAM, SUBBIAH;QI, CAI B.;KIM, KYUNGHOON
分类号 C23C14/32;H01J37/32;(IPC1-7):C23C14/22 主分类号 C23C14/32
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