发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To improve a film shape against an abrupt step of a semiconductor device by forming a metal wiring layer on the step formed on a semiconductor substrate, and melting the wiring layer. CONSTITUTION:A metal wiring layer 4 is formed on a substrate 1 having steps 2 and 3. A metal wiring layer 4 is thermally melted by heat treatment. The layer 4 is flattened by thermally melting, and the abrupt steps 2, 3 are smoothened. Even if the thickness of the layer 4 is thick, the steps can be readily flattened.
申请公布号 JPS62132348(A) 申请公布日期 1987.06.15
申请号 JP19850273040 申请日期 1985.12.04
申请人 SONY CORP 发明人 SUGANO YUKIYASU;YAMAMOTO HIROSHI
分类号 H01L21/3205 主分类号 H01L21/3205
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