| 摘要 |
PURPOSE:To achieve a highly accurate measurement with the titled device of a small size, by arranging two parallel strip wires to introduce and reflect a microwave in the measurement of an electronic spin resonance or a ferromagnetic resonance using a microwave. CONSTITUTION:A microwave is introduced to strip wires 13 and 14 comprising a gold foil or the like from a coaxial cable 11. A clearance 15 is arranged between the strip wires 13 and 14 to provide a quartz 16. A dielectric quartz 17' and a flat plate 18' are provided facing this and a sample 19 is inserted into the side of the dielectric substance 17' to construct a triplate type resonator. Then, a microwave is applied from a cable 11 to generate a standing wave. Receiving a line of magnetic force, the sample 19 magnetically resonates to absorb the microwave and hence, the intensity of reflection is reduced. The intensity of reflection of the microwave is introduced to a detector from the cable 11 for detection. Unlike a hollow resonator, a resonator for measurement of magnetic resonance can be made smaller and handy thereby enabling highly sensitive measurement of a wafer of even a large dimensions.
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