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发明名称
METHOD OF OBTAINING DESIRED PATTERNS OF THIN ALUMINIUM OXIDE AL DOWN 2 O DOWN 3
摘要
申请公布号
PL256367(A1)
申请公布日期
1987.06.15
申请号
PL19850256367
申请日期
1985.11.21
申请人
INST TECH ELEKTRONOWEJ
发明人
MURAWSKI WOJCIECH
分类号
H01L;H01L21/31;(IPC1-7):H01L/
主分类号
H01L
代理机构
代理人
主权项
地址
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