| 摘要 |
PURPOSE:To stably and accurately measure a fine current range without influ ence of an external light by a probe card by providing a liquid crystal plate as for shielding the external light at the top of an opening of a probe card body. CONSTITUTION:A liquid crystal plate 8 for shielding an external light is pro vided at the top of an opening 2 of a probe card body. A driving circuit 10 is operated before measurement to set the plate 8 in a light permeable state. Thus, a probe needle 4 can be disposed at a desired electrode pad of a semicon ductor element or an integrated circuit formed on a wafer 5. Further, the entire plate 8 is set to an opaque state. Thus, electric characteristics of the semiconduc tor element or circuit characteristics of the integrated circuit can be stably and accurately measured in a fine current range without being under influence of an external light.
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