| 摘要 |
<p>PURPOSE:To measure and correct the moving quantity of a holder even though the holder is expanded or contracted and is shifted due to its temperature change and to correctly obtain the position of the substrate by providing marks for measuring the position of the holder at the four corners of the holder on the periphery of the installing part. CONSTITUTION:Marks 2 for position measurement are provided at four corners of a holder main body 1 on the periphery of an installating part 1a whereon a substrate 4 for photo mask is fixed by mask fixing pins 3 of the holder main body 1. The holder main body 1 is fixed by holder fixing pins 6 on a stage 7 and the stage 7 is shifted in X-Y biaxial directions by an X-axis driving motor 8 and a Y-axis driving motor 9. The moving amount of the holder due to the temperature change and so on of the holder can be obtained by measuring the marks 2 for position measurement at the our corners of the holder 1 and comparing the position of the holder and the position of the stage 7.</p> |
