| 摘要 |
PURPOSE:To automatically inspect the size of all thin holes of an electron gun parts, by attaching suction pipes to the ends of pipes of a vacuum suction system, placing the pipes in suction contact around the thin holes of an electron gun parts on one side thereof, and measuring the pressure of evacuation in the prescribed portion of each of the pipes to make judgment. CONSTITUTION:Suction pipes 3 provided at the ends of vacuum suction pipes 6, which are connected to vacuum pumps 7 for suction through the pipes, are placed in suction contact around the grid holes 2 of an electron gun parts on one side thereof to suck air through the thin holes 2. The pressure of evacuation in the prescribed portions of each suction pipe 6 is measured by pressure switches 4, 5 to detect a defective member for which the pressure of evacuation is excessively high or low. If the measured pressure is within a prescribed range, and diameter of each grid hole 2 is judged to be good. According to this constitution, the form of the hole 2 or the outline thereof cannot be found out. If investigation is performed in the stage of trial manufacture, the diameter of the hole 2 is not made improper, in general. Once such impropriety happens, a large number of defective members are produced. For that reason, the impropriety can be immediately found out. According to this constitution, all the grid holes 2 can be automatically inspected.
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