ULTRASONIC WAVE PROBE AND ITS MANUFACTURE

摘要

PURPOSE:To improve sound field characteristics by connecting plural piezoelectric chips with fillers in the direction of plate face to form a composite piezoelectric chip and forming a drive electrode for generating an ultrasonic wave to both major planes of the composite piezoelectric plate to facilitate the manufacture and to arrange diaphragms in an optional form. CONSTITUTION:Minute piezoelectric chips 1 made of a material such as a PZT are arranged on a flat face of a packing member 2 at a prescribed interval D1 in matrix two-dimensionally. A filler 3 made of epoxy or silicon resin is buried in each slot 3 being a gap of each piezoelectric chip 1 to form a composite piezoelectric sheet 4 comprising the assemblage of the piezoelectric chips 1. Plural annular electrodes 6a-6c having an equal area equal to that of a circular electrode 5 are formed on one major plane of the packing member of the composite piezoelectric plate 4 as positive drive electrodes by printing or baking. Full face electrodes 7 of negative polarity paired with the positive electrodes are formed on the other major plane. Thus, the mutual interval D2 between the circular and annular composite vibrators is kept constant to facilitate the arrangement.