| 摘要 |
PURPOSE:To enable the titled spraying device to spray different kinds of material into a lamination layer, a film and the like in an efficient manner using a spraying device by a method wherein a plurality of upstream chambers, which jet out fine particles through a reduction-expansion nozzle, are provided in such a manner that the nozzle is directed to a movable substrate and that the adjoining upstream chambers are shifted in font and rear and left and right directions toward the shifting direction of the substrate. CONSTITUTION:A plurality of upstream chambers 2, which jet out fine particles through a reduction-expansion nozzle 1, are provided along the moving direction of a substrate 3 with the nozzle 1 directing to the movable substrate 3. Accordingly, the fine particles are conveyed in the form of beam, the dispersion of the fine particles can be suppressed to minimum, and even if different kinds of fine particles are jetted out at the same time from a plurality of reduction-expansion nozzles 1, the mixing of these particles can be prevented. On the other hand, as the substrate 3 can be moved and each reduction-expansion nozzle 1 is positioned along the moving direction of the substrate 1, different kinds of fine particles can be jetted out from each reduction-expansion nozzle 1, and the stage of lamination of different kinds of fine particles can be formed by simply shifting the substrate 3.
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