| 摘要 |
PURPOSE:To convey a wafer by selectively supporting a wafer boat in a first state that its longitudinal axis is vertical or in a second state that its axis is oblique, and readily and effectively charging/removing the wafer in the second state. CONSTITUTION:A supporting base 62 of boat supporting means 36 is elevationally movable, and the means 36 is normally and reversely rotatable around a shaft 92. A boat 96 is opened at its front face, having longitudinally wafer W containing grooves at a predetermined interval. The grooves are inclined at 0<=alpha<=45 deg. from a horizontal upwardly toward the opening in a first state that the axis of the boat is vertical, and the grooves are inclined at 0<=theta<=45 deg. from a horizontal in a second state that the axis is turned, and the grooves are substantially perpendicular to the horizontal. When a wafer W is transferred to between a cassette 44 on cassette supporting means 32 and the boat 96 in the meantime, the wafer can be readily and effectively charged/ removed. Then, the boat 96 is erected together with a supporting frame 80 to be raised to a first position 80B, the boat is disposed in a first state 96B, the upper end of the boat is suspended to communicate with a conveyor. The wafer is processed in a vertical furnace.
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