| 摘要 |
PURPOSE:To remove securely a photodetecting element whose photocurrent is deficient by installing plural light sources at an angle to the photodetection surface of a photodetecting element. CONSTITUTION:When the photodetection surface 6a of the photodetecting element 6 is irradiated with light from light sources 1-5 at a front position and positions shifting from it, the photocurrent distribution is as shown in a figure (a) as long as the element 6 is normal or as shown in, for example, a figure (b) when abnormal. The figure (b) shows that the photocurrent decreases at a hatched part with the angle of a light source owing to the dirt or air bubbles on the surface of the element 6. For the purpose, the photodetection surface is irradiated with light from the light source 1 installed at the position vertical to the surface of the element 6 and the light sources 2-5 shifting in position by 30 deg. each to the light source 1 in order, the photocurrent generated by the element 6 at this time is measured by a tester 7 to decide whether the element 6 is normal or not from the value on the basis of the characteristics of the figures (a) and (b), and the element 6 is sectioned in a storage box 8 by a handler 9.
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