| 摘要 |
PURPOSE:To make it possible to measure the configurational error of object having a complicated shape, by simple constitution such that Moire interference fringes by imaginary object free from a calculated configurational error and actual object are respectively displayed at the same time. CONSTITUTION:When a reference mirror 12 is moved by a driving controller 14, the relative phase of reflected interference beams from a measuring mirror 16 and a mirror 12 successively changes by pi/2 and an interference fringe due to interference beams is displayed on a TV monitor 24 through an image sensor/ monitor 11 and a memory/data processor 15. A reading circuit 23 is also controlled through the controller 14 and the Moire interference fringe to imaginary matter free from a configurational error written in a recording apparatus 22 at every phase difference preliminarily calculated by an operation circuit 21 to correspond is simultaneously displayed on the monitor 24. By this simple constitution wherein it is unnecessary to form a hologram of an object interference fringe by display, the configurational error of complicated object of which the interference fringe intensity distribution does not form sine function is measured. |
