| 摘要 |
PURPOSE:To effectively oxidize and decompose germanes by irradiating UV rays on the gaseous mixture of germanes and an oxidizing gas. CONSTITUTION:The gaseous mixture of germanes such as a monogermane, and oxidizing gas such as gaseous oxygen, etc., is charged into a reactor, etc. UV rays from a mercury lamp, etc., is irradiated on the mixture at room temp. to about 40 deg.C to oxidize and decomposed the germanes. The monogermane contained in the gaseous mixture can be reduced to a trace amt. by this method. The irradiation time of UV rays is determined in accordance with the intensity of the UV rays, the concn. of the germanes, etc. |
