发明名称 SCANNING ELECTRON MICROSCOPE
摘要 PURPOSE:To improve operation and prevent baking of a phosphor by supplying horizontal deflection coils of a display device with scanning signals when analyzing a sample while a set signal from an analysis point set circuit is selected. CONSTITUTION:After fixing an analysis point on a sample by analysis point set operation, change-over circuits 2 and 3 are changed-over while setting a switch 21 ON. By said operation, the scanning signals X and Y are not supplied to the scanning coils 7 and 8 while an X-axis deflection coil 11 is supplied with the scanning signal X so that electron rays 6 get into a state of suspension at the analysis point on the sample and the switch 21 is in a state of OFF so as to supply a grid G with a luminous point signal from a luminous point generation circuit 19. Accordingly, a sample image A', the luminous point M' and the analysis point P are displayed on a cathode-ray tube 10 but, since the scanning signal X is always supplied to an X-axis deflection coil, no positional slippage exists between the luminous point M of the sample image A' and the analysis point P while causing no change in their positions even when changing scanning speed.
申请公布号 JPS62128420(A) 申请公布日期 1987.06.10
申请号 JP19850269005 申请日期 1985.11.29
申请人 JEOL LTD 发明人 UCHIUMI HIROSHI
分类号 H01J37/22;H01J37/252;H01J37/28 主分类号 H01J37/22
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