| 摘要 |
PURPOSE:To realize a compact design by a method wherein driving is regulated of three cassette mounts, two conveying units, a unit for the planar positioning of a flat element, and two delivery units. CONSTITUTION:Cassettes mounts 1A-1C are capable of free vertical movement, a first conveyer belt 4 and a second conveyer belt 5 continuous to the first conveyer belt 4 are positioned facing a cassette 1, and a wafer positioning unit 17 is positioned near the ends of the two conveyer belts 4, 5. A wafer processing unit 20 includes an X-Y stage and monitor unit, etc. A cylinder 20A is provided with a revolving mechanism. A wafer delivery arm 18 is provided between the wafer positioning unit 17 and a cylinder 20A. Near a cassette 3, a conveyer belt 6 is installed in line with the belt 5 and, between the conveyer belts 4 and 6, an auxiliary delivery unit 19 is positioned to deliver wafers from a wafer positioning unit 17 to the first belts 4, 6. An auxiliary arm 19A is capable of rotary, vertical, and linear movements. This design allows the space to be effectively used for the realization of a compact design and the wafers to move in one direction only, increasing throughput.
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