发明名称 TEMPERATURE REGULATOR FOR PURE WATER RINSE
摘要 PURPOSE:To improve working characteristic and stability in a developing process, by equalizing temperatures of developing solution and a pure water rinse by inserting a conduit pipe for a pure water rinse into a tank of a temperature regulating part. CONSTITUTION:A pipe 1 for developing solution and a pipe 2 for a pure water rinse are installed in a tank 4 which is filled with a heat medium 5 and into which a pipe 3 for heating and cooling is inserted. Thus, temperature of the pure water rinse is equalized with that of the developing solution. This can improve working characteristic and safety in a developing work of photo process.
申请公布号 JPS62128119(A) 申请公布日期 1987.06.10
申请号 JP19850267503 申请日期 1985.11.29
申请人 CANON INC;CANON HANBAI KK 发明人 MATSUO MANABU
分类号 H01L21/30;H01L21/027 主分类号 H01L21/30
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