| 摘要 |
PURPOSE:To make a mass separation electromagnet small-sized and light- weighing by so constituting a mass separation part that a mass separation analytic tube and the mass separation electromagnet are electrically insulated while positive or negative voltage is impressed on the mass separation analytic tube. CONSTITUTION:A mass separation part selecting only a beam of the required ion kind from ion beams out of an ion source has the constitution in which a mass separation analytic tube 10 and a mass separation electromagnet are electrically isolated while impressing positive or negative voltage on the mass separation analytic tube 10 and a static electric field and a static magnetic field are made not to interact so as to perform mass separation by adding the magnetic field generated by the mass analytic electromagnet of earthed potential to the mass separation analytic tube floating facing high potential. Accordingly, the mass separation electromagnet can be made small-sized and light-weighing thus enabling to draw out a large amount of ion beams able to be impressed with high acceleration voltage while being low voltage.
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