| 摘要 |
<p>PURPOSE:To enhance the resistance against ion impact by forming, on a metallic or a heat resistant conductive base, a coating layer comprising carbide or boride of IVa group, Va group or La. CONSTITUTION:In hot cathode parts of an ion source used for vacuum deposition, a coating film of carbide or boride of IV2 group, Va group or La is applied on a hot cathode, whereby the spattering ratio by rare gas is reduced and the reaction with oxygen can hardly happen, thus making possible the increase in operation time.</p> |
