| 摘要 |
PURPOSE:To simultaneously form films uniform in film thickness and film quantity on many supports by arranging plural pieces of cylindrical supports between a couple of cylindrical discharge electrodes concentrically arranged and forming the films while rotating the supports on these axes and revolving the supports. CONSTITUTION:The cylindrical supports 3a-3h made of Al are fitted on the holding members 9 planted on a turntable in the prescribed intervals, and the inside of a reaction chamber 1 is decompressed and exhausted by an exhausting system 16 and the supports 3a-3h are heated at the prescribed temp. While introducing reaction gas into the trap chambers 14a, 14b through the gas feed pipes 12a-12h and feeding uniformly it to the inside of the reaction chamber 1 through the discharge holes 15, high frequency electric power is imparted between the electrodes 2a, 2b and the supports 3a-3h from an electric power source 20 and reaction gas is decomposed by exciting plasma. At this time, the supports 3a-3h are revolved by the turntable 4 by means of a motor 5 and also rotated on these axes by the fixed inner gears 11 and the spur gears 10 of the rotational mechanisms 8. Thereby films uniform in film thickness and film quality are formed in excellent productivity on the outside circumferential surfaces of every supports 3a-3h.
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