| 摘要 |
PURPOSE:To reduce a waiting time and the cost by moving a beam by repeating in order the process of irradiating one beam pulse on the work point and by irradiating the necessary number of pulses on the whole work points. CONSTITUTION:The body 7 to be worked on an X-Y table 6 is parted into plural work blocks 17.... A piece of pulse is then irradiated on a work point 21 by locating an electron beam 8 at the block center position 10 first, then by deflecting the beam. Then one piece of the pulse is irradiated on the work point 23 as well by deflecting the beam and this is repeated in order. The necessary number of pulses is irradiated on the whole work points by returning to the work point 21 again after reaching to the final work point 25. After the block 17 being completed it is moved to the block 17'. The need of taking the waiting time 100 times the pulse width in the case of fixing the beam is therefore eliminated and the cost can be reduced by reducing the waiting time.
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