发明名称 |
Surface acoustic wave devices and method of manufacture thereof |
摘要 |
A phase and amplitude compensated surface acoustic wave (SAW) structure is described in which computer controlled compensation is achieved by laser chemical etching of selective portions of a compound chemical film deposited on the surface of a piezoelectric SAW substrate in the path of propagation. The compound film comprises a layer of amplitude attenuating cermet material formed on the substrate and a phase compensating layer of molybdenum formed over the cermet material and in contact with the substrate surface.
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申请公布号 |
US4672254(A) |
申请公布日期 |
1987.06.09 |
申请号 |
US19850786585 |
申请日期 |
1985.10.11 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
DOLAT, VICTOR S.;EHRLICH, DANIEL J.;TSAO, JEFFREY Y. |
分类号 |
H03H3/08;H03H9/02;(IPC1-7):H01L41/04;H01L41/18;B44C1/22;C23F1/02 |
主分类号 |
H03H3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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