发明名称 |
Method of forming suspended gate, chemically sensitive field-effect transistor |
摘要 |
A method is disclosed for forming a chemically sensitive field-effect transistor having a suspended gate which enables the uniform and reproducible manufacture of such devices. Controlled uniformity and device response is provided by this method which makes the field-effect transistors suitable for use as sensors, alarms and analyzers for gases. A method of regenerating a chemically sensitive field-effect transistor having a suspended gate is also disclosed. |
申请公布号 |
US4671852(A) |
申请公布日期 |
1987.06.09 |
申请号 |
US19860860722 |
申请日期 |
1986.05.07 |
申请人 |
THE STANDARD OIL COMPANY |
发明人 |
PYKE, STEPHEN C. |
分类号 |
C23F1/38;G01N27/414;(IPC1-7):C23F1/02;B44C1/22;C03C15/00;C03C25/06 |
主分类号 |
C23F1/38 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|