| 摘要 |
PURPOSE:To improve the versatility and productivity of the titled device by constituting an I-PD control system as a position control device for a moving body and improving the dynamic characteristics of the moving body based on gain operation in a feedback compensation control system. CONSTITUTION:The position of the moving body 1 is measured by a length measuring system 3, its current position XR is fed back as a digital value by a counter 4 and a difference between the current position XR and an objective position X0 held by a latch circuit 6 is calculated by a computing element 7 to calculate a position deviation DELTAX. The output DELTAX is inputted to a block 9 to execute integrating operation for setting up a steady position deviation of the control system to zero and its gain K1 is calculated by a block 10 and inputted to a block 17. A current speed VR calculated by a speed computing element 12 is supplied to a block 13 to calculate its gain K2, a negative position deviation data -DELTAX is calculated by an arithmetic block 15 and supplied to a block 16 to calculate its gain K3, both the gain values K2, K3 are added by an arithmetic block 14, and the added gain is subtracted from said gain K1 by the arithmetic block 17 to calculate a digital manipulated variable D0.
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