| 摘要 |
PURPOSE:To make it possible to obtain the sharp image of a specimen, by taking out X-ray having a single wavelength to converge the same to a specimen and performing scanning with the converged spot by the deflection of electron beam. CONSTITUTION:The electron beam 37 emitted by an electronic gun 22 is converged by a converging lens 23 and deflected by a deflector 24 to irradiate a target 25. The target 25 emits X-ray beam 39 which is, in turn, transmitted through a wavelength filter 27 to be converged to a Fresnel zone plate 28 and the obtained converged spot of X-ray beam 40 with a single wavelength is projected to the specimen 36 positioned in front of an X-ray detector 29. A computer 32 projects the detection image of the detector 29 to a specimen 36 and alters the electron beam deflection condition of a deflector 24 to a predetermined one. An X-ray detector 30 detects the X-rays or secondary electron from the surface of the specimen and the detectors 29, 30 are changed over by a switch 35 to make it possible to simultaneously know the external and internal structures of the specimen. |
