| 摘要 |
<p>PURPOSE:To effectively remove the contamination without losing the surface of a thin film material by injecting pure water which is supplied into a tubular shaft while rotating a guide at a high speed by the shaft to clean off the surface of the material. CONSTITUTION:A pair of sponge units 13 which communicate from inside bore side to outside bore side at numerous spongy clearances in a cylindrical shape are respectively engaged fixedly with tubular shafts 10. The shaft 10 is formed of metal material of synthetic resin material such as Teflon, and many pores 11 which has approx. 5mm. in diameter are opened. Superpure water 14 is supplied from below to the shaft 10, flowed from the pores 11 into the spongy units 13 and injected at both side from the outside bore sides. Both shafts 10 are rotated at a high speed such as approx. 3,000rpm to clean it, thereby rotating the spongy units 13. Thus, the superpure water 14 is injected by a centrifugal force from the outer bore side of the units 13 which rotate at high speed to collide with both side surfaces of a glass mask 1 which moves relatively in parallel with the units 13, thereby cleaning of the adhered contamination.</p> |
