| 摘要 |
PURPOSE:To reduce a series resistance and to enhance a conversion efficiency by laminating two or more P-type or N-type a-Si layers of a-Si layer side contacted with a transparent conductive layer by increasing power density at every layer. CONSTITUTION:A solar battery 9 is composed of a light transmitting insulating substrate 10, a transparent conductive layer 11, an a-Si layer 16 having a first P-type a-Si layer 12, a second P-type a-Si layer 13, an I-type a-Si layer 14 and an N-type a-Si layer 15, and an electrode 17. The substrate 10 is manufactured of a soda lime glass, and a transparent conductive layer 11 made of indium oxide containing tin as an impurity is formed on the main surface. Then, SiH4 added with B2H6 is used as reaction gas, the first layer 12 made of P-type a-Si:H is laminated on the layer 11 by a CVD method. Thus, a resistive contact is improved in a boundary between the transparent conductive layer and an a-Si layer 6, a series resistance is improved, a shortcircuiting current and a file factor are increased to obtain a high conversion efficiency. |
