| 摘要 |
PURPOSE:To decrease the number of detectors by turning a wafer placed on a table and rotating the wafer between one end and the other end of an orientation flat being detected. CONSTITUTION:A wafer being carried is placed on a table 1, a centering arm 3 is moved inward in order to align the centers of the wafer and the table 1, the centers are positioned completely, the wafer is sucked by a vacuum port 7, and the centering arm 3 is moved outward. An orientation flat is positioned under the state, but the table 1 is stopped when the table 1 is rotated to the left so as to be turned until the state of a detector 2 changes when the wafer is brought to a state 10. The table is revolved until the detector 2 detects the other end of the orientation flat 11 in the direction (right revolution) that the detector 2 passes through the orientation flat 11. The table is rotated in the opposite direction from the state, and stopped when one end of the orientation flat 11 is detected again.
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